PVD Process Tool

Situation

An equipment company developed an alpha PVD tool to deposit SiN coating on sapphire wafers. The results from the Alpha tool has generated much customer interests.

Problem

The Alpha tool design will not meet fab production needs due to throughput, process capabilities, SAFETY, and lack of robust automation. ODI customer did not have an internal team capable of scaling this tool to meet production expectations.

ODI Role

Owens Design completely redesigned the PVD tool from carrier handler to process chamber. Collaborating with our customer, ODI improved and refined the PVD tool to allow for higher throughput and better process performance.