CASE STUDIES

Wafer Vacuum Metrology Platform (Modular)

The Situation

New metrology technology needed to be implemented in a cost effective, modular architecture that met the highest standards for semiconductor factory automation.

The Challenge

Metrology technology required high vacuum environment. High vacuum pumping system needed to be packaged into a small footprint.

The Solution

Owens partnered with the client to implement a unique approach to vacuum wafer handling automation. Tool footprint and cost dramatically reduced.

Wafer Vacuum Metrology Platform
Wafer Vacuum Metrology Platform Modular
Contact us to learn more about custom automation solutions