Wafer Vertical Furnace

Situation

Semiconductor wafer furnace company needed to modernize their control systems and create more reliable wafer & boat handling systems

Problem

Current handling system was unreliable, difficult and unsafe to align, and had many costly components. The controls system was so severely dated that electronic components were no longer available.

ODI Role

Owens Design redesigned the wafer handling and FOUP management system, including a self-teaching feature. The controls were upgraded to a modular architecture to save cost, improve manufacturability and improve robustness.